JPS594028A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Manufacturing device of semiconductor
Assignee: Fujitsu Ltd
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Filing: 1982-06-30
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Granted: —
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Expires: 2002-06-30
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Kenji Koyama
- 👤 小山 堅二
- 👤 Kanetake Takasaki
- 👤 高崎 金剛
- 👤 Masao Sugita
- 👤 杉田 正夫
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-31 12:21
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/3244
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
JPS5468169A
Cited
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