Multilayered film having high durability and its production

Abstract

Abstract PURPOSE:To obtain wear resistant multilayered films having durability to salt water, high temp. and high humidity by forming alternately thin films of metallic oxide having a specific high refractive index and low refractive index on a substrate and forming an oxidized Ta or an oxidized Ta-Ti film on the uppermost layer. CONSTITUTION:This invention relates to a method for producing optically multilayered interference films by laminating alternately a thin film of metallic oxide having high refractive index and a thin film of metallic oxide having low refractive index on a substrate, wherein an org. titanium compd. soln. or a soln. mixture composed of an org. titanium compd. and an org. tantalum compd. is used as a coating soln. for forming the film having a high refractive index and is coated on the substrate or the film having low refractive index and is then subjected to a heating treatment, thereby forming the film having a high refractive index. An org. silicon compd. soln. contg. phosphorus pentaoxide is coated as a coated soln. for forming the film having a low refractive index and is subjected to a heating treatment, thereby forming the film having a low refractive index. An org. tantalum compd. soln. or a soln. mixture composed of an org. tantalum compd. and org. titanium compd. is coated as a coating soln. for forming the film having a high refractive index on the uppermost layer on the film of the next layer having a low refractive index, and is subjected to a heating treatment, thereby forming the film having a high refractive index on the uppermost layer.

Inventors

• 👤 Noriyoshi Saito
• 👤 斉藤　徳良
• 👤 Seiji Yoshikoshi
• 👤 吉越　清次
• 👤 Eiji Nishida
• 👤 西田　英治
• 👤 Masanori Iwamori
• 👤 岩森　優範

Bibliographic Details