liquid jet recording head

Abstract

Abstract PURPOSE:To provide a highly reliable head which is precise and durable by a method wherein the main part of the wall surface of a liquid passage on an ink jet head is formed with the hardening of a photosensitive resin. CONSTITUTION:Energy generating elements 2 for forming flying drops of a liquid are arranged on an appropriate substrate 1 made of glass or the like. A dry film photoresist 3 is laminated and fixed on the elements under pressure. Then, a photomask 4 with a pattern 4p is stacked on the resist 3 and exposed to light. The photoresist 3 outside the pattern 4p region is hardened under a polymerization reaction and becomes insoluble in a solvent while the non-exposed part is left soluble. Then, the product thus formed is immersed in a volatile organic solvent to remove the non-exposed part and subsequently, the hardened resist film 3H left is further hardened by thermal polymerization or the like. Then, a dry film photoresist 5 is laminated on the surface of the resist film 3H in such a manner as not to penetrate thereinto and exposed to light from above a photomask 6 with a specified pattern 6p placed thereon while unhardened parts thereof is removed in a solvent.

Inventors

• 👤 Hiroshi Sugitani
• 👤 博志 杉谷
• 👤 Hiroto Matsuda
• 👤 弘人 松田
• 👤 Masami Ikeda
• 👤 雅実 池田

Bibliographic Details