Producing device for photosensitive body

Abstract

Abstract PURPOSE:To permit production of plural pieces of photosensitive bodies at one time and to reduce costs considerably by arranging plural pieces of combinations of high frequency electrodes and photosensitive substrates along the inside wall surface of a vessel. CONSTITUTION:Plural pieces of matching boxes 2 for impedance matching in the stage of introducing high frequencies are disposed at equal intervals on the outside surface of the circumferential wall of a cylindrical vacuum vessel 1. The same quantities of high frequency electrodes 3 of a cylindrical shape are disposed on the inside surface of the circumferential wall of the vessel 1 by facing said boxes. Thereupon the inside of the vessel 1 is evacuated to a vacuum through an air discharge port 14, and a gaseous silicon compd. is blown uniformly from the inside of connecting pipes 4 to the inside surface sides of the electrodes 3. When high frequencies are introduced to the electrodes 3, glow discharge is generated between the same and the photosensitive substrates of metallic drums 6. Then the gaseous silicon compd. is decomposed by the glow disharge and alpha-Si layers are deposited on the surface of the drums 6, whereby the good photosensitive drums are obtained.

Inventors

• 👤 Isao Myokan
• 👤 明官　功
• 👤 Masatoshi Matsuzaki
• 👤 松崎　正年
• 👤 Tetsuo Shima
• 👤 徹男 嶋
• 👤 Toshiki Yamazaki
• 👤 山崎　敏規

Bibliographic Details