Waste gas disposing device

Abstract

Abstract PURPOSE:To obtain a waste gas disposing device that can be connected easily to a device such as a plasma CVD which exhausts poisonous gas without necessitating high temperature and without lowering the capacity of an exhaust system by decomposing the waste gas by plasma discharge. CONSTITUTION:A waste gas disposing device 12, a reaction tank 11 of a plasma CVD device 10 and a vacuum pump 13 are connected by stop valves 5, 7. The valves 5, 7 are opened to let flow only nonpoisonous gas such as H2 out of material gas to regulate atmospheric pressure in the reaction tank 11 and the container 4 of the waste gas diposing device 12. After generating glow discharge between parallel plate-like electrodes provided in the container 4, poisonous waste gas such as SiH4 etc. is introduced into the waste gas disposing device 12 and the waste gas is decomposed by plasma discharge.

Inventors

• 👤 Toshiaki Kagawa
• 👤 香川　俊明
• 👤 Nobuo Matsumoto
• 👤 信雄 松本

Bibliographic Details