Multilayer wiring constitution

Abstract

Abstract PURPOSE:To avoid the turbulence and deformation of multilayer wiring improving the quality by a method wherein the insulator are laid between the insulating layers flowing at specified temperature to prevent the layers from flowing at the temperature. CONSTITUTION:Mo wirings 30, 31, 32 and 33 arranged on the substrate 1 and the stepless and flat insulating layers 34, 35 and 36 made of PbO-SiO2 flowing at 800 deg.C and the other insulating layers 37, 38 and 39 made of SiO2 not flowing at said temperature are alternately laminated constituting the multilayer wiring. Through these procedures, the flowing insulating layers are prevented from reflowing to improve their quality.

Inventors

• 👤 Kinya Kato
• 👤 加藤　謹矢
• 👤 Keizo Shiyudo
• 👤 首藤　啓三
• 👤 Hirohiko Hasegawa
• 👤 長谷川　太彦
• 👤 Hiroo Ito
• 👤 伊東　裕夫
• 👤 Makoto Terajima
• 👤 寺島　諒

Bibliographic Details