Air velocity controlling system for air cleaner

Abstract

Abstract PURPOSE:To constantly maintain a quantity of purified air in a desired quantity, by measuring a blown air quantity from an air cleaner having a filtering medium type filter, and controlling the number of revolutions of a blower driving motor in accordance with the measured value, in a semiconductor manufacturing factory, etc. CONSTITUTION:A sensor 26 which measures air blowing velocity is provided to the vicinity of a blowing port of an air cleaner 24 to input the detected value to a detecting arithmetic device 28, and the output of the device 28 is compared with a desired air velocity which is set by an air velocity setter 30, to change the output voltage and frequency of a voltage and frequency controller 22 in accordance with this level. Because the controller 22 is provided between an electromagnetic contactor 18, connected to a commercial AC source, and a blower driving motor M to control the number of revolutions of the motor M in accordance with the change of output voltage and frequency of the controller 22, the velocity of purified air blown from the air cleaner 24 is maintained usually in a set up air velocity.

Inventors

• 👤 Koichi Yanagisawa
• 👤 柳沢　孝一
• 👤 Soei Kanai
• 👤 金井　荘栄

Bibliographic Details