JPS58199860A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Film forming method
Assignee: Hitachi Ltd
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Filing: 1982-05-17
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Granted: —
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Expires: 2002-05-17
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Hide Kobayashi
- 👤 秀 小林
- 👤 Kazuyuki Fujimoto
- 👤 藤本 一之
- 👤 Yoshio Nakagawa
- 👤 宣雄 中川
- 👤 Katsuo Abe
- 👤 勝男 阿部
- 👤 Tsuneaki Kamei
- 👤 亀井 常彰
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 08:24
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3492; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402; H01J37/3405; H01J37/3408; H01J37/3411; H01J37/3414; H01J37/3426; H01J37/3429; H01J37/345; H01J37/3458
Claims Analysis
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References Cited (Backward Citations)
JPS58171569A
Cited
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