Solid state image pickup device

Abstract

Abstract PURPOSE:To prevent fogging and thereby to improve resolution by a method wherein a structure is employed, wherein light incident upon a certain picture element does not exemplifiedly due to reflection reach neighboring picture elements, in a solid state image pickup device wherein a light shield is provided vertical to the device substrate in places not occupied by light receiving sections constituting the photosensitive regions for the device. CONSTITUTION:A multiplicity of picture elements consisting of an N<+> light receiving section 2, an N<+> type transfer section 3, an N<+> type overflow drain section 4 is formed on an Si substrate. Above each transfer section 3, piled one upon another buried in the SiO2 film 5 are polycrystalline charge transfer electrodes 6, 7, and an Al film 8 serving as a transfer-to-the-drain-section electrode and light shield. They are then covered with a passivation film 9 composed exemplifiedly of PSG, when an opening is provided above the film 8 and is filled with photosensitive substance, and the opening is converted into a light shield section 16 balck in color after prescribed treatment. A glass substrate 12 with a color separating filter 11, a light shield film 13, a colored filter 14 underneath is attached by means of adhesive 10, for incidence of a light 15 upon the receiving section 2.

Inventors

• 👤 Okio Yoshida
• 👤 吉田　興夫

Bibliographic Details