Magnetic recording medium
Abstract
Abstract PURPOSE:To obtain a magnetic recording medium with enhanced magnetic characteristics and vertical anisotropy, by forming a layer with small coercive force made of a Co-Ta alloy film and a Co-Cr-Ta alloy film having magnetic anisotropy in the vertical direction to the film surface on a nonmagnetic substrate. CONSTITUTION:A target T1 obtd. by arranging Ta II in the form of fan on a disk I of 100% Co as shown by the oblique lines is attached to one target holder 16 of a supttering apparatus using paired facing targets, a discoid target T2 of 100% Co is attached to the other target holder 16, and an amorphous Co alloy film contg. >=23wt% Ta as a layer with small coercive force is formed on a nonmagnetic substrate 40 of polyethylene terephthalate or the like. A vertically magnetizable layer contg. 2-10 atomic% Ta is then formed using a target plate T1 obtd. by placing a fan-shaped Ta plate on part of a Co-Cr alloy plate contg. >=17 atomic% Cr and a Co-Cr alloy target plate T2. The adhesive properties of both the layers are improved, and the durability is considerably enhanced.
Inventors
- 👤 Sadao Kadokura
- 👤 貞夫 門倉
- 👤 Kazuhiko Honjo
- 👤 和彦 本庄
- 👤 Masahiko Naoe
- 👤 直江 正彦
Bibliographic Details
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