Sterilizing method of supply system for high purity water

Abstract

Abstract PURPOSE:To maintain a supply system for high purity water in a germ-free state easily and economically by constituting said system of a closed water circuit consisting of an ozone feeder, a storage tank, a UV irradiating device, a cooler and a pump. CONSTITUTION:While high purity water is supplied from a producing stage 1 for high purity water, ozone is dissolved therein in a ozone feeder 3 to fill the ozone-contg. water in the closed water circuit including a storage water tank 4; thereafter, a circulating pump 12 is driven to circulate the ozone-contg. water for a prescribed time, whereby the inside of the closed water circuit is sterilized. The concn. of ozone in the circulating water is measured with a dissolved ozone meter 6, and an ozone supply device 2 is so controlled as to maintain the value necessary for sterilization. After the end of sterilization, the supply of ozone is stopped, and a UV irradiating device 5 is lighted to decompose the ozone to the prescribed concn. After cooling, the circulation is stopped, and the sterilized high purity water in the system is supplied to a packing device 8 or a washer.

Inventors

• 👤 Ryuichi Sazuka
• 👤 佐塚　隆一
• 👤 Toshiaki Kuwabara
• 👤 利明 桑原
• 👤 Toshio Nakamura
• 👤 寿男 中村
• 👤 Kiyokatsu Ueda
• 👤 上田　清勝

Bibliographic Details