Gap setter

Abstract

Abstract PURPOSE:To provide a gap setter enabled to control the gap with high precision in relation to the whole surface of a wafer by a method wherein taper and a curve of either or both of the wafer and a mask are corrected. CONSTITUTION:A first gap sensor 59 is fixed to a mask stage 55, the interval gw between the wafer 60 and the first gap sensor 59 is measured by the gap sensor 59 thereof, and the measured value thereof is inputted to a computer 58 through an interface 57. While a wafer holder 61 holding the wafer 60 is held by three adjusting screws 62A, 62B and 62C (not shown in the figure) and a tension spring 63, and the setter is constituted as to make height and inclination of the wafer holder 61 thereof to be adjusted by three motors 64A, 64B, and 64C (not shown in the figure) connected respectively to the three adjusting screws 62A, 62B, 62C through the interface 57 according to the command of the computer 58.

Inventors

• 👤 Junji Hazama
• 👤 間　潤治

Bibliographic Details