Formation of vapor-deposited film consisting of two or more elements

Abstract

Abstract PURPOSE:To form a vapor-deposited film consisting of a plurality of elements having a uniform composition over the full thickness of the film on a substrate by forming a vapor-deposited film consisting of a plurality of elements on other substrate and reevaporating the film. CONSTITUTION:A mother alloy 3 consisting of >=2 constituent elements is put in a boat 2 in a bell jar 1 and evaporated by heating to form a vapor-deposited film 5 on a substrate 4. The film 5 has a concn. distribution in the thickness direction. The film 5 is set on a heat insulator 7 in the jar 1 with the film surface upward and evaporated by heating with an infrared heater 6 to form a vapor-deposited film 9 on a substrate 8. During this reevaporation the element segregated in the vicinity of the surface of the film 5 is heated at first and forced to be evaporated. As a result, the film 9 has a uniform concn. distribution. This method is advantageously applicable to be manufacture of an electrophotographic receptor, etc.

Inventors

• 👤 Masahiro Kameda

Bibliographic Details