Target for image pick-up tube

Abstract

Abstract PURPOSE:To simplify the manufacture by laminating a transparent conductive film, first and second conductive films and Sb2S3 thus to produce a target having large area and uniform photoconductive film. CONSTITUTION:A transparent conductive film 2 made of SnO2, for example, is coated on a light permeable substrate 1 through spraying. Then a first photoconductive film 3 composed of selenium-arsenic compound containing more than 50atom% of selenium is laminated on said film through vacuum deposition. Thereafter a second photoconductive film 4 composed of a selenium-arsenic compound containing more selenium than said first photoconductive film or of selenium is coated with the film depth of 1,000Angstrom , for example. Then Sb2S3 film 5 is laminated on the second photoconductive film 4 under argon environment through spattering or vacuum deposition. Consequently the production process is simplified to produce a target having large area.

Inventors

• 👤 Koichi Sakurai

Bibliographic Details