Thin film magnetic head and its manufacture

Abstract

Abstract PURPOSE:To reduce magnetic leakage, and to improve a magnetic conversion efficiency, by joining in one body a substrate on which a lower magnetic layer, a winding layer and other magnetic head component parts have been formed, and a protective plate on which an upper magnetic layer has been formed. CONSTITUTION:On a substrate 10 cosisting of silicon, etc., a lower magnetic layer 11 and an insulating layer 12 are formed by means of spattering and etching, etc., and also a spiral winding 13 is formed by means of vapor-deposition of a conductive material, and etching. Subsequently, an insulating layer 14 is formed, and on both end parts of this indulating layer 14, an upper magnetic layer 15 of the gap part and an upper magnetic layer 16 of the back-gap part are formed respectively. On the other hand, on a protective plate such as glass, etc., upper magnetic layers 21, 22 are formed in advance by a photoresist process. Thereafter, the substate 10 and the protective plate 17 are joined in one body through an adhesive agent, and the part of line D is ground, by which the sliding surface of a magnetic tape is formed. In this way, each comonent parts can be manufactured with a high accuracy and a distance between the upper and lower magnetic substances ca be secured sufficiently, therefore,magnetic leakage is reduced and the magnetic conversion efficiency is elevated.

Inventors

• 👤 Akira Niimi
• 👤 Hirotsugu Takagi
• 👤 Takeshi Sawada
• 👤 Hiroshi Yoneda
• 👤 Shuzo Abiko
• 👤 Hiroichi Goto

Bibliographic Details