Pressure sensor

Abstract

Abstract PURPOSE:To measure a pressure detecting the displacement of a diaphragm by determining changes in the quantity of a light which enters the diaphragm from an optical fiber through a lens and then is inputted into the fiber again through the lens as a reflected light. CONSTITUTION:A light from a photodetector 10 of a light signal processing section 9 enters an optical fiber 1 passing by half through a half mirror 11 and by half through a lens 14. The light coming from the optical fiber 1 is reflected on a diaphragm 3 passing through a lens 2 and returns to the optical fiber passing through the lens 2 again. Then, the light is reflected on the half mirror 11 via the lens and detected with a photodetector 13. The quentity of the light changes as the diaphragm displaces under a pressure. If the diaphragm 3 is set at a point A or B in the drawing beforehand, an output can be obtained with a good linearity regardless of changes in the pressure. This enables accurate measurement of pressure even at a place remote or loaded with much electromagnetic noise.

Inventors

• 👤 Teruhito Matsui

Bibliographic Details