Measurement of resistivity of semiconductor

Abstract

Abstract PURPOSE:To obtain a correct measured value, by a method wherein the measurement of resistivity is done after deciding a measuring position in accordance with a signal designating measuring position fed from a control circuit and the value is corrected by a correcting circuit. CONSTITUTION:A semiconductor sample 1 to be measured is placed on a measurement positioning mechanism 6 to move the positioned mechanism (so that) the sample is located at a predetermined measuring position by a designating signal fed from a control circuit 10 and a measuring probe 5 contacts with the sample 1 to perform the measurement of resistivity by a measuring circuit 7 containing a constant-current source and a voltage measuring circuit. And the measured result is sent to a measured value correcting circuit 8 and a memory stores the correction factor list on position. Therefore, a correction factor for the measuring position is read out from the correction factor list in accordance with measuring position information sent from the control circuit 10 and a correct measured value can be obtained by multiplying the correction factor by the measured result.

Inventors

• 👤 Junichi Shimizu
• 👤 Hidezo Kashiwa
• 👤 Toshinori Konaka

Bibliographic Details