Laser working device
Abstract
Abstract PURPOSE:To permit changing of power density and working area continuously over a wide range by providing means of changing the transmittance of the laser light oscillated from a laser oscillator and means of changing the beam diameter of the laser light. CONSTITUTION:A dye laser oscillator 3 is excited by the nitrogen laser light 2 from a nitrogen laser oscillator 1, and the oscillated dye laser light is bent by reflecting mirrors 5, 5' and is passed through a continuous transmittance-variable filter 6 and a beam expander 7. The transmittance is changed continuously by this filter 6, and the power density and working area of the working part are changed continuously by the expander 7. The beam is bent by a dichroic mirror 8 and is irradiated to a variable slit 9. Here, the laser light 4 is formed to a rectangular shape of an arbitrary size and is condensed and irradiated onto the work 12 by an objective lens 10 to the size of an inverse number of 10 times the lens, whereby the work is worked to exactly the same position and size of the projected image of the slit 9 by the reference light from a reference light source 13.
Inventors
- 👤 Mikio Hongo
- 👤 Hiroshi Yamaguchi
- 👤 Takeoki Miyauchi
- 👤 Katsuro Mizukoshi
Bibliographic Details
Claims Analysis
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