Manufacture of solid state color image pickup element

Abstract

Abstract PURPOSE:To enable to form a high quality multicolor separation filter in a short process of manufacture by a method wherein the base material of color separation filter is formed into one which develops multicolors using an organic high molecule substance as a base material. CONSTITUTION:The base material layer 2 of the color resolving filter, having an organic high molecule substance as a base material, is formed on the semiconductor susbstrate 1 whereon a number of photo-detecting sections 10 and a driving circuit section 11 were formed. Then, an exposure is performed using a white light (w) through the intermediary of a mask 3 which is fitted to the substrate 1 and has the prescribed spectral characteristics at the stipulated section. Then, developing and fixing works are performed. Through these procedures, the desired section of the layer 2 is colored giving the prescribed spectral characteristics to the prescribed section. Subsequently, a protective film 5 consisting of radioactive ray sensing organic high molecular material is formed all over the substrate, and the color separation filter of double layer structure is completed. Then, an aperture is provided on the layers 2 and 5, and the necessary sections such as a bonding pad section 12 and the like are exposed. Then, a thin wire 13 is connected to the bonding pad.

Inventors

• 👤 Tatsuo Fuji

Bibliographic Details