Solid state color image pickup element

Abstract

Abstract PURPOSE:To sharply reduce the surface reflection factor of an Al film filter as well as to obtain the picture signal of high quality having no halation by a method wherein a light absorbing layer is provided on the upper surface of an Al film to be used for the shielding of light. CONSTITUTION:The charge corresponding to the light L1, which was incidented to photo-diode P1 and P2 sections, is accumulated on the N<+> diffusion layers 2a and 2b formed on an Si substrate 1. Then, vertical switches MOSFET T1 and T2 are conducted by applying a clock pulse to gate electrodes 3a and 3b, and the charge is read out through vertical signal lines 4a and 4b. In this solid state image pickup element, an Al film 10 is formed as a light-shielding filter on the interlayer insulating film 7 located between the signal lines 4a and 4b, and a black light-absorbing layer 11 is coated on the film 10. Accordingly, the generation of a false signal is prevented by reducing the surface reflection factor greatly, and the color image pickup element of high quality having no halation can be obtained.

Inventors

• 👤 Akiya Izumi
• 👤 Tatsuo Tanabe
• 👤 Tsunehisa Horiuchi
• 👤 Kiyoyuki Miyata
• 👤 Shigeru Oshiba

Bibliographic Details