Electron beam device

Abstract

Abstract PURPOSE:To obtain the quantity of electron beams always in a stable condition, by keeping only the continuous operation of heating a filament in a vessel when its separate valve is operated for the replacement of samples. CONSTITUTION:To obtain an independent vacuum state in a vessle 4, a knob 14 is pushed to close an electon beam passage at the lower portion of an anode 3 by a seperate valve 11 integrally formed with a shaft 12. Then a microswitch 13 is operated, and the operation of a relay 15 turns off a high voltage control switch 6' to stop the supply of a high voltage the accelerates an electron beam. Here the heating power of a filament is not cut out by the operation of the microswitch 13, then the firing for a heater for heating source of the electron beam is continued even if the seperate valve 11 is actuated to obtain independent vacuum state in the vessel 4.

Inventors

• 👤 Yoshihisa Namikawa

Bibliographic Details