Manufacture of photoconductive element

Abstract

Abstract PURPOSE:To uniformly form a photoconductive film having uniform characteristics by laminating ZnSSe or ZnSe, (ZnCdTe) (In2Te3) specified in composition on a transparent conductive film while cyclically moving a glass substrate having a transparent conductive film on one side surface. CONSTITUTION:A heater 6 is provided on the upper portion in a bell-jar 1, a circular rotary disk 2 rotating at low speed around an axis 3 as a center is arranged under the heater, a plurality of holes 4 are perforated at equal interval at the circular edge of the disk 2, and a glass substrate 5 becoming a face plate of an image pickup tube and provided with a transparent conductive film underneath thereof is engaged therewith. There are arranged crucibles 7-9 having heating filament with insulating coating on the bottom of the bell-jar 1 while interposing a shutter therebetween corresponding to the holes. The crucible 7 contains ZnSxSe1-x (0<= X<=1) or ZnSe, the crucible 8 contains (ZnyCd1-yTe)z (0<=y, z<=1), and the crucibl 9 contains (In2Te3)1-z having the same values of y, z, and they are laminated thereon, and can be deposited on the transparent conductive film.

Inventors

• 👤 Katsumi Itagaki
• 👤 Junta Yamamoto
• 👤 Tetsuo Kamikado
• 👤 Koichi Nomura

Bibliographic Details