Correction of white-spotted defect on photo mask

Abstract

Abstract PURPOSE:To accurately and quickly correct white-spotted defects on the photo mask by a method wherein pulverized metal powder is placed on the photo mask covering white-spotted sections and the powder is dissolved and adhered to the defective sections by irradiating a laser beam. CONSTITUTION:When there is the white-spotted defect in a normal Cr pattern 2 on a glass substrate 1, pulverized powder of Cr, Ni, Fe, Co, or their alloy is sprinkled in such way that it is covering the white-spotted sections. And, the laser beam which is matched to the shape and size of the defect is irradiated. The powder 4 which has received the laser beam 5 is changed into a molten and solidified film and the defective section is corrected by this film 6. In order to give a strong adhesive power to the molten and solidified film, the laser beam with a wide pulse width or a continuous oscillation laser beam is to be used. With this method used, the correction of the white-spotted defect on the photo mask can be performed in a half day, for which several days were required before, thereby enabling to sharply reduce the time required, to reduce the length of the manufacturing process and to simplify the process of the correction.

Inventors

• 👤 Takeoki Miyauchi
• 👤 Masao Mitani
• 👤 Mikio Hongo

Bibliographic Details