Manufacture of solid state color image pickup element

Abstract

Abstract PURPOSE: To obtain an excellent picture quality by reducing the size of each filter pattern on an exposing mask which is used in manufacturing color filters smaller than the size of the picture element integrated on the solid state image pickup IC. CONSTITUTION: The image pickup LSI is constituted by a substrate 1, photodiodes 2-1, 2-2,... and an insulating film 3. Filtering materials 4-1, 4-2, and 4-3 constitute the first∼third color filters, respectively. The spaces between the filters are covered by high molecular resin intermediate layers 5-1, 5-2, and 5-3 for separating colors and protection. Incident light 6 passes through the color filters. Then, the first color light enters into the photodiode 2-1, the second color light enters into the photodiodes 2-2, and the third color light enters into the photodiode 2-3. COPYRIGHT: (C)1981,JPO&Japio

Inventors

• 👤 Norio Koike
• 👤 Akira Sasano
• 👤 Morio Taniguchi
• 👤 Toshio Nakano
• 👤 Masakazu Aoki
• 👤 Kayao Takemoto

Bibliographic Details