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JPS56155802A Expired / Lapsed JP ⏱️ 0.0 years remaining

Recognition device

Assignee: Fujitsu Ltd
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Filing: 1980-05-06
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Granted: —
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Expires: 2000-05-06
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Abstract

Abstract PURPOSE:To detect a light image at a high SN ratio by alternating a reflected light source and transmitted light source which illuminate a pattern on a ceramic substrate of hybrid IC. CONSTITUTION:To detect the light image of wiring pattern 4 on IC chip 3 of hybrid IC, illumination light source change-over circuit 19 opens shutter 12 and light from reflected light source 11 is projected on IC chip 3 through half-mirror 15. The reflected light image is detected by image pickup element 16 and binary-coded by preprocessing circuit 17, and pattern detecting circuit 18 detects its position. To detect the light image of wiring pattern 2 on a ceramic substrate, illumination light source change-over circuit 19 opens shutter 14 to irradiate substrate 1 with light from transmitted light source 13. Thus, the light images are detected at high SN ratios and detection are reduced.

Inventors

  • 👤 Masahito Nakajima
  • 👤 Tetsuo Hizuka
  • 👤 Yushi Inagaki

Bibliographic Details

Application Number —
Jurisdiction JP
Data Source google_patents
Last Synchronized 2026-11-06 13:19
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70

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