Electron microscope

Abstract

Abstract PURPOSE:To perform the independent control of the rotation of an electron beam image irrespectively of the image magnification, by providing an electromagnetic lens at the position or the proximity of the electron beam image formed in a focusing lens system for the purpose to control the rotation of the image. CONSTITUTION:An electromagnetic lens 13 for controlling the rotation of image is provided at the image face position of an intermediater lens 4. By adjusting the excitation of the lens 13, the image position is rotated in free direction around the central axis or the optical axis 1 while maintaining the magnification of the electron beam image focused on a fluorescent plate 6 to be constant.

Inventors

• 👤 Yoshihiro Arai

Bibliographic Details