Production of gallium phosphide
Abstract
Abstract PURPOSE: To economically obtain gallium phosphide suitable for mass production by heating gallium hydrophosphite at a high temp. in a reducing atmosphere. CONSTITUTION: Magnetic boat 3 is put into reaction tube 2 inserted in heating furnace 1, heat resistant plug 4 is attached to one end of tube 2, and duct 5 for feeding gas into tube 2 is allowed to pierce plug 4. Gallium hypophosphite is charged into boat 3, and boat 3 is set in a uniform temp. zone to be formed by heating. An inert gas such as argon is fed from duct 5, and the temp. of furnace 1 is raised to heat the uniform temp. zone to 600W1000°C. The feed of the inert gas is then stopped, and a reducing gas such as hydrogen gas is fed. After reaction the reducing gas is changed for the inert gas, and the temp. of furnace 1 is lowered. The gallium hypophosphite in boat 3 is reduced, forming gallium phosphide. COPYRIGHT: (C)1980,JPO&Japio
Inventors
- 👤 Kiyoshi Hisatomi
- 👤 Masaharu Watanabe
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