Semi-conductor device

Abstract

Abstract PURPOSE: To prevent a searching needle from contacting two electrodes by increasing mechanical strength by preventing increase in an element capacith in such a manner that surrounding of a group of electrodes formed in holes of the same dimensions bored on an insulation film of a semi- conductor base plate. CONSTITUTION: Electrodes 3 are provided by boring round windows on an insulation film 12 on a base plate 11, and ring-shape metallic projections 15 are provided on surrounding of the electrodes 13 by keeping intervals smaller than width of tip of a searching needle 14. When the searching needle 14 is in contast with surrounding of an electrode 13, the needle is supported by the projection 15 to prevent it from coming off from the electrode due to vibration. When the searching needle is in contact with the shortest section of the intervals among the electrodes, as the searching needle 14 contacts the projection 15 or the insulation film 12, passage between the searching needle and the electrode 13 become open, and the searching needle is positioned by confirming characteristics between the searching needle 14 and the base plate 11, and when normal characteristics of a shot key element were confirmed, position of the searching needle is fixed. In this manner, the searching needle 14 is always in contact with electrode 13. The metallic projection 15 is formed in 2 layer of Ti and gold, and it is to be formed in a narrow- width layer so as to minimize its parastic capacity. COPYRIGHT: (C)1980,JPO&Japio

Inventors

• 👤 Takanori Kawamoto

Bibliographic Details