Measuring unit for physical quantity in vacuum vessel

Abstract

Abstract PURPOSE: To offer the measuring unit possible for the movement along any locus for the sensor, with complete vacuum seal through the bellows covering moving part, in the unit swinging and straight moving the sensor sensing part in the vacuum vessel. CONSTITUTION: The unit consists of the following arm 8 supporting the sensor 6, at least two sets of parallel links 10, 11, formed in the crossed two planes and supporting the arm 8, core rod 19 in which the connection of the beams 16W18 up and down of the parallel link set can be bent to all directions and which is located at the center along axially, bellows 36 provided by covering the part fitting the following arm 8 at least among the parallel link sets 10, 11, first air-tight part holding one end of the bellows in air tight to the following arm 8, second air tight holder holding the opening of the vacuum vessel 1 to the other end of the bellows 36 in air tight, and the drive arm 9 driving the beam where no follower arm of the parallel links 11, 10 is fixed in a given condition. COPYRIGHT: (C)1980,JPO&Japio

Inventors

• 👤 Yasushi Aikawa
• 👤 Toru Matoba
• 👤 Taro Iwamoto
• 👤 Moritomo Ando
• 👤 Takashi Watanabe

Bibliographic Details