Measuring method for current density distribution of electron beam

Abstract

Abstract PURPOSE: To attain simple and rapid measurement by obtaining current density in one of needed regions by measuring current values in several regions sharing at least one boundary and then by processing them by adding or subtracting. CONSTITUTION: Electron beam 2 is shaped by 1st stop 5 with rectangular opening 5-1 and the sectional size of the electron beam passing through rectangular hole 8-1 of 2nd stop 8 is controlled by deflector 7 controlled by an external signal. Then, when current density distribution is measured by obtaining current density in each region obtained by partitioning the section of the electron beam, current values in several regions sharing at least one boundary with region A are measured and the current value in this region is calculated repeatedly by adding or subtracting those current values, thereby obtaining the current density. Consequently, simple and rapid measurement is possible even if current density distribution would be uneven. COPYRIGHT: (C)1980,JPO&Japio

Inventors

• 👤 Nobuyuki Yasutake
• 👤 Junichi Kai
• 👤 Susumu Funayama
• 👤 Tadashi Nakamura

Bibliographic Details