Method of forming film of titanium oxide on plastic base plate

Abstract

Abstract PURPOSE: After a plastic base plate is irradiated with oxygen-ion beam, titanium or its oxide is deposited on the plate under irradiation of oxygen-ion beam, thus forming titanium oxide films with greatly high adhesion without heating the base plate. CONSTITUTION: Without heating a plastic base plate to high temperatures, it is irradiated with oxygen-ion beams to modify the surface. Then, under irradiation of oxygen-ion beams, titanium or titanium oxide, preferably titanium monoxide, is vaporized and deposited on the surface of the base plate by the sputtering method to form titanium dioxide film on the base plate. COPYRIGHT: (C)1980,JPO&Japio

Inventors

• 👤 Tatsuhiko Sawaguchi

Bibliographic Details