Temperature characteristics tester

Abstract

Abstract PURPOSE: To largely shorten the time required to raise or lower the temperature of a specimen base in a temperature characteristics tester by separately providing the specimen base for carrying a specimen, a heater and a cooler. CONSTITUTION: A heater 2' is set at high temperature (for example, at 300°C.) and a cooler 3' is at low temperature (for example, at 25°C.) in advance, and a rotary shaft 5 is mounted rotatably at the base 1 carrying a semiconductor wafer 11 thereon to thereby make the cooler 3' first contact with the base 1. After the characteristics of any semiconductor element formed on the wafer 11 as carried on the base 1 in this state are measured by a probe (containing a needle 12 and lead wire 13), the lead wire 13 is connected to a DC power supply to thereby apply predetermined reverse voltage to the semiconductor element. When the shaft 5 is then reotated, the cooler 3' is separated from the base 1 and the heater 2 is contacted with the base 1, the base 1 is heated at high teperature rapidly and retained at the temperature of the heater 2'. COPYRIGHT: (C)1980,JPO&Japio

Inventors

• 👤 Hiroshi Tokunaga
• 👤 Nobuo Toyokura
• 👤 Toru Shinoki

Bibliographic Details