Pressure detecting equipment

Abstract

Abstract PURPOSE: To heighten mechanical strength of principal section (of the pressure detecting equipment) by combining a semiconductor diaphragm, a boric silicate glass such as pyrex, etc., and ferro-nicket alloy structural member using anodic combination method. CONSTITUTION: Three kinds of structural members including a silicon diaphragm, a pyrex glass and ferro-nickel alloy metal are piled up respectively and undergo anodic combination process in a fixed-temperature tank maintained at a relatively low temperature as approximately 300°C. At this time, a DC voltage of 1200V is impressed with the silicon side and the ferro-nickel alloy side as plus and the pyrex glass side as minus. COPYRIGHT: (C)1980,JPO&Japio

Inventors

• 👤 Yoshitaka Matsuoka
• 👤 Michitaka Shimazoe
• 👤 Yoshiki Yamamoto
• 👤 Mitsuaki Ai
• 👤 Keiji Miyauchi
• 👤 Hideyuki Nemoto
• 👤 Masatoshi Tsuchiya
• 👤 Masanori Tanabe

Bibliographic Details