Production of 3-5 group compound crystal

Abstract

Abstract PURPOSE: To obtain III-V group cpd. crystal pellets suitable for use as liquid phase epitaxy raw material without a loss due to working by dividedly distributing a III group element in a container having many recesses and by heating the container and a V group element in a reaction tube. CONSTITUTION: A plurality of independent recesses 1 are made in quartz plate 2 or the like, and a predetermined amt. of a III group element with a low vapor press., e.g. Ge is dividedly distributed to recesses 1. Container 2 and a V group element with a high vapor press., e.g. As are put into reaction tube 4, and tube 4 is evacuated and hermetically sealed. Container 2 is then heated to a temp. at which a desired III-V group cpd. is synthesized. At the same time, the temp. of part of tube 4 is made lowest, and this temp. is kept at above the decomposition vapor press. of the V group element from the III-V group cpd. melt. Thus, III-V group cpd. crystal pellets are obtd. COPYRIGHT: (C)1980,JPO&Japio

Inventors

• 👤 Toshiya Toyoshima
• 👤 Junkichi Nakagawa
• 👤 Seiji Mizuniwa
• 👤 Toshio Sagawa

Bibliographic Details