Shape measuring apparatus

Abstract

Abstract PURPOSE: To make the measurement of the shapes of objects possible at a high speed in the absence of any contact with the objects and without moving the same by forming a light spot on the object to be measured through scanning of a light beam and detecting the output showing the displacement of the image of this light spot. CONSTITUTION: Light from a light source 1 is passed through a reflecting morror 3, rotary mirror 4, etc. to image a light spot on an object M. This light spot is imaged on a photo detector 8 by a condenser lens 6, and its position is determined by the unevenness of the object M. From the photo detector 8, the output S proportional to the image position of the light spot on a photo detecting surface is obtained. However, the output S and the change component of the displacement of the object M are not proportional and therefore they are made to become proportional by a correcting circuit 10. The intensity distribution of the image is made identical by letting the locus of the image of the light spot and photo detecting surface coincide. If these error factors are eliminated, the signal proportional to the unevenness of the object M may be output from the circuit 10 by scanning the spot position by the rotary mirror 4. COPYRIGHT: (C)1980,JPO&Japio

Inventors

• 👤 Hitoshi Takabayashi
• 👤 Toshio Ichikawa

Bibliographic Details