Absolute pressure type pressure senser

Abstract

Abstract PURPOSE: To evade change of standard pressure by positioning the free end of the bottom of an electrode hole in inner side of a space adjacent to a seal when a cap having an electrode hole for drawing an electrode disposed on standard pressure chamber and a diaphragm is jointed onto the diaphragm. CONSTITUTION: To compose a diaphragm, on the inner surface of a N-type Si basic plate 2 recess 20 is disposed and on the outer surface P-type area 22 is formed in diffusion. Next, BSG membrane generated in this operation is deleted to form a fall 25 and whole surface are coated with SiO 2 membrance 24. Thereafter the membrance 24 is also perforated to attach an electrode 27 for contacting with the area 22 and a cap having standard pressure chamber and an electrode hole 11 in whole surface is jointed through seal 5 and contact part 4. In this conststitution, the bottom free end of the electrode 11 is positioned in the inner side of the space 6 between the seal 5 and the contact 4 in the fall 25, so that the standard chamber 10 can be completely sealed from the outerside and vacuum maintenance is assured. COPYRIGHT: (C)1980,JPO&Japio

Inventors

• 👤 Satoshi Shimada
• 👤 Motohisa Nishihara
• 👤 Hiroji Kawakami
• 👤 Kiyomitsu Suzuki
• 👤 Tomotsugu Inui

Bibliographic Details