Clean box

Abstract

Abstract PURPOSE:To obtain a clean box suitable for transporting and storing semifinished products of semiconductor by a method wherein a fan for supplying air with pressure and a filter for filtering it are provided on a box having an air intake and an outlet of the atomosphere in the box, and thereby clean air is introduced. CONSTITUTION:Air intake 8a is provided on the upper part of a box 7, and outlet 8b for the atmosphere in the box is provided on its lower part. A fan 9, which is connected to a motor 10 and which is used for supplying air with pressure, and a filter 11 for filtering air are arranged. By the fan 9, air is sent with pressure from intake 8a to the filter 11 and it is filtered, and it becomes clean air. This is introduced into a clean chamber 12 and then it is discharged from outlet 8b. A work 1 is put into the clean chamber 12 from a door 7a. Since the work 1 is kept in a clean atmosphere, this box is suitable for storing and transporting components and semifinished products which detect contamination.

Inventors

• 👤 Masakazu Yokoyama
• 👤 Shinichi Yamamoto

Bibliographic Details