JPS548972A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Forming method for fine electrode of semiconductor element
Assignee: Mitsubishi Electric Corp
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Filing: 1977-06-23
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Granted: —
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Expires: 1997-06-23
Abstract
Abstract PURPOSE: To make the width of a vopor-deposited electrode fine, by vapor-depositing metal slantingly and by shielding some part of metal by the shoulder of one resist. COPYRIGHT: (C)1979,JPO&Japio
Inventors
- 👤 Shigeru Mitsui
- 👤 Yoshinobu Kadowaki
- 👤 Masaaki Nakatani
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-30 01:07
CPC Classifications
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