JPS5432984A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Integrated circuit device
Assignee: Hitachi Ltd
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Filing: 1977-08-19
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Granted: —
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Expires: 1997-08-19
Abstract
Abstract PURPOSE: To manufacture an element insulation layer by filling a groove, whose flank except its bottom is surrounded with an insulator, with Si or poly Si and by oxidizing it. COPYRIGHT: (C)1979,JPO&Japio
Inventors
- 👤 Hisao Nakajima
- 👤 Hisayuki Higuchi
- 👤 Akira Shintani
- 👤 Masao Kawamura
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-28 17:40
CPC Classifications
—
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