Measuring apparatus of suction air flow rates

Abstract

Abstract PURPOSE: To achieve the improvement in the accuracy of flow rate measurement by supporting and fixing a temperature-dependent resistor on the substrate surface of inorganic insulation material and so constituting said substrate that it also serves to support and fix lead members which supply electric power. CONSTITUTION: Glass material 42 is used for the substrate of a temperature-dependent resistor 2 and metal wires having plating films depending upon cases are used for lead members 44. Further the substrate and lead members 44 are to be fusion-bonded and therefore the members which have thermal characteristics matching to those of the glass member 42 for substrate are used for the lead members 44. The temperature-dependent resistor 2 is covered with the protection film composed of inorganic insulation material, e.g., glass 46, so as to protect the resistor against mechanical and chemical effects and to prevent fluid from directly contacting the resistor. The lead members 44 of the temperature-dependent resistor 2 are welded to the electrodes on an insulation substrate. Such constitution enabbles flow rate to be measured accurately. COPYRIGHT: (C)1979,JPO&Japio

Inventors

• 👤 Takashige Ooyama
• 👤 Teruo Yamauchi
• 👤 Mamoru Fujieda
• 👤 Yutaka Nishimura
• 👤 Takao Sasayama
• 👤 Shinichi Sakamoto
• 👤 Hisatoku Moriya
• 👤 Takeshi Atago
• 👤 Kanemasa Sato
• 👤 Kiichi Hoshi
• 👤 Sadayasu Ueno
• 👤 Tadahiko Otani
• 👤 Mineo Kashiwatani

Bibliographic Details