JPS5384553A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Ion injection method of multiplex channeling
Assignee: Fujitsu Ltd
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Filing: 1976-12-29
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Granted: —
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Expires: 1996-12-29
Abstract
Abstract PURPOSE:To form a given impurity distribution, by keeping the acceleration voltage constant, and by combinating multiply the impurity distribution obtained by changing the angle of injection and the quantity of injection in the range of channeling phanomenon caused to the crystal axis of low index for the direction of ion injection.
Inventors
- 👤 Tsuguo Fukuda
- 👤 Hidetoshi Nishi
- 👤 Teruo Sakurai
- 👤 Tsuneo Furuya
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-04 10:28
CPC Classifications
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