JPS5372297A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Cooling apparatus
Assignee: Hitachi Ltd
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Filing: 1976-12-10
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Granted: —
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Expires: 1996-12-10
Abstract
Abstract PURPOSE: To provide a cooling apparatus applicable to cooling means for test piece tables of ion beam machining equipment or electron-beam-applied equipment used in the high level of vacuum or the like which is able to prevent pollution and stabilize pressure in the main airtight chamber by checking refrigerant from permeating thereinto. COPYRIGHT: (C)1978,JPO&Japio
Inventors
- 👤 Norio Kanai
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-03 18:40
CPC Classifications
—
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