JPS5348459A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Production of semiconductor device
Assignee: Mitsubishi Electric Corp
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Filing: 1976-10-14
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Granted: —
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Expires: 1996-10-14
Abstract
Abstract PURPOSE: To make an epitaxially grown layer having a uniform thickness distribution by fabricating a cover member to provide a height distribution to melt. COPYRIGHT: (C)1978,JPO&Japio
Inventors
- 👤 Toshio Tanaka
- 👤 Jun Ishii
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-05 20:27
CPC Classifications
—
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