JPS5267573A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Manufacturing device for semiconductor
Assignee: Sony Corp
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Filing: 1975-12-02
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Granted: —
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Expires: 1995-12-02
Abstract
Abstract PURPOSE:To provide a gaseous phase growth device wherein the high purity growth is not prevented on changing operation of the substrate and at the same time, the temperature in the reaction tube can be kept at the fixed normal condition.
Inventors
- 👤 Kenji Morisane
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-30 02:55
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/4401; C23C16/4408
Claims Analysis
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