JPS526528A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Method of forming resist film
Assignee: International Business Machines Corp
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Filing: 1976-06-09
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Granted: —
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Expires: 1996-06-09
Abstract
No abstract record available.
Inventors
- 👤 Mouritsutsu Horugaa
- 👤 Paaru Gaabaa
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-30 15:33
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/2022; G03F7/004; G03F7/022; G03F7/0226; G03F7/085; H; H10; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041
Claims Analysis
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References Cited (Backward Citations)
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