JPS5222883A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Air cleaner unit for semiconductor unit
Assignee: DAN SANGYO KK
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Filing: 1975-08-14
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Granted: —
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Expires: 1995-08-14
Abstract
Abstract PURPOSE: To improve air and gas screen effect between an operation room and outer space by an air cartain, and to get an air cleaner unit effectively using the cleaned air. COPYRIGHT: (C)1977,JPO&Japio
Inventors
- 👤 Kazumasa Ono
- 👤 Hideichiro Onaga
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-29 13:34
CPC Classifications
—
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