JPS5220294A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Method of and apparatus for manufacturing compound thin film
Assignee: Panasonic Holdings Corp
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Filing: 1975-08-08
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Granted: —
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Expires: 1995-08-08
Abstract
Abstract PURPOSE:To provide a means for compound thin film, which is stable over a long period of time and is subject to less fluctuations.
Inventors
- 👤 Yasuhiro Shimizu
- 👤 Koichi Shinohara
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-31 14:28
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/54
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