Patent US4543280A successfully refreshed from Google Patents.
JPS52154369A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Method of positioning mask pattern and apparatus therefor
Assignee: Koninklijke Philips NV
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Filing: 1977-01-24
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Granted: —
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Expires: 1997-01-24
Abstract
No abstract record available.
Inventors
- 👤 Boouuisu Geisuberutasu
- 👤 Furanshisukasu Ranbo Seodorasu
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-06 00:50
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7073; G03F9/7076; G02; G02B; G02B27/00; G02B27/18; G03F9/7049
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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