JPS51112193A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Processing method of semiconductor equipment
Assignee: Panasonic Holdings Corp
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Filing: 1975-03-28
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Granted: —
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Expires: 1995-03-28
Abstract
Abstract PURPOSE: To make the size of the basic element to compose the semiconductor integrated circuit as small as possible and to make the polylayer wiring enable. COPYRIGHT: (C)1976,JPO&Japio
Inventors
- 👤 Eisuke Ichinohe
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-04 09:36
CPC Classifications
—
Claims Analysis
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References Cited (Backward Citations)
JPS502472A
Cited
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