Vibration sensor

Abstract

Abstract Translated from Japanese (57)【要約】 【課題】 振動数が低い領域であっても安定して振動を 検知できる振動センサーを提供する。 【解決手段】 固定電極１と、両端部が支持されて所定 間隔を設け空気を介して固定電極１に対面した可動電極 ２と、可動電極２に固着されて電荷を保持した電荷保持 面３１が固定電極１に対面したエレクトレット膜３と、 振動時に可動電極２に変位を与えるよう固定電極１の反 対側に設けられた重り４と、を備え、固定電極１と可動 電極２との間の静電容量変化を測定して振動を検知する 振動センサであって、前記重り４は検知する振動数と比 べて装着状態で高い固有振動数を有して、前記振動によ って前記重り４に衝撃を印加する衝撃印加手段が設けら れた構成にしてある。 (57) [Summary] [PROBLEMS] To provide a vibration sensor capable of stably detecting vibration even in a low frequency region. SOLUTION: A fixed electrode 1, a movable electrode 2 supported at both ends and provided at a predetermined interval and facing the fixed electrode 1 through air, and a charge holding surface 31 fixed to the movable electrode 2 and holding a charge are provided. An electret film 3 facing the fixed electrode 1, A weight 4 provided on the opposite side of the fixed electrode 1 so as to apply a displacement to the movable electrode 2 at the time of vibration, and detects a vibration by measuring a change in capacitance between the fixed electrode 1 and the movable electrode 2 A vibration sensor, wherein the weight 4 has a higher natural frequency in a mounted state compared to a frequency to be detected, and has a configuration in which impact applying means for applying an impact to the weight 4 by the vibration is provided. is there.

Inventors

• 👤 Takuro Nakamura
• 👤 卓郎 中邑

Bibliographic Details